产品
iSECS: 工厂侧Host系统的SECS/GEM 驱动
iSECS:工厂侧Host系统的SECS/GEM 驱动
支持的SEMI通讯标准:
•SEMI E4 - RS232 (Serial Port)
•SEMI E37 - HSMS (TCP/IP)
•SEMI E5 - SECS-II Message Specification
•SEMI E30 - Generic Equipment Model (GEM)
•SEMI PV2 – PV ECI
•SEMI HB4 -- HB-LED ECI
•SEMI A3 -- PCBECI
主要功能:
•Data Collection
•Event Notification
•Alarm Notification
•Remote Command
•Process Program
•Others