iSECS: SECS/GEM Driver for factory host systems

Supported SEMI Standards：

•SEMI E4 - RS232 (Serial Port) 

•SEMI E37 - HSMS (TCP/IP) 

•SEMI E5 - SECS-II Message Specification 

•SEMI E30 - Generic Equipment Model (GEM) 

•SEMI PV2 – PV ECI 

•SEMI HB4 -- HB-LED ECI 

•SEMI A3 -- PCBECI 

Main features:

•Data Collection 

•Event Notification 

•Alarm Notification 

•Remote Command 

•Process Program 

•Others